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Thin film deposition : ウィキペディア英語版
Thin film
A thin film is a layer of material ranging from fractions of a nanometer (monolayer) to several micrometers in thickness. Electronic semiconductor devices and optical coatings are the main applications benefiting from thin-film construction.
A familiar application of thin films is the household mirror, which typically has a thin metal coating on the back of a sheet of glass to form a reflective interface. The process of silvering was once commonly used to produce mirrors. A very-thin-film coating (less than about 50 nanometers thick) is used to produce two-way mirrors.
The performance of optical coatings (e.g., antireflective, or AR, coatings) are typically enhanced when the thin-film coating consists of multiple layers having varying thicknesses and refractive indices. Alternatively, with the hybrid nanostructures of dielectric nanoparticles and dieletric coating, the optically incoupling can also be further enhanced.〔Optically enhanced semi-transparent organic solar cells through hybrid metal/nanoparticle/dielectric nanostructure http://dx.doi.org/10.1016/j.nanoen.2015.08.014〕 Similarly, a periodic structure of alternating thin films of different materials may collectively form a so-called superlattice which exploits the phenomenon of quantum confinement by restricting electronic phenomena to two-dimensions.
Work is being done with ferromagnetic and ferroelectric〔(Thinfilm and InkTec awarded IDTechEx' Technical Development Manufacturing Award ) IDTechEx, April 15th 2009〕 thin films for use as computer memory. It is also being applied to pharmaceuticals, via thin-film drug delivery. Thin-films are used to produce thin-film batteries and thin film solar cells.
Ceramic thin films are in wide use. The relatively high hardness and inertness of ceramic materials make this type of thin coating of interest for protection of substrate materials against corrosion, oxidation and wear. In particular, the use of such coatings on cutting tools can extend the life of these items by several orders of magnitude.
Research is being done on a new class of thin-film inorganic oxide materials, called amorphous heavy-metal cation multicomponent oxides, which could be used to make transparent transistors that are inexpensive, stable, and environmentally benign.〔(【引用サイトリンク】title=Major advance made in transparent electronics )
==Deposition==
The act of applying a thin film to a surface is ''thin-film deposition'' – any technique for depositing a thin film of material onto a substrate or onto previously deposited layers. "Thin" is a relative term, but most deposition techniques control layer thickness within a few tens of nanometres. Molecular beam epitaxy allows a single layer of atoms to be deposited at a time.
It is useful in the manufacture of optics (for reflective, anti-reflective coatings or self-cleaning glass, for instance), electronics (layers of insulators, semiconductors, and conductors form integrated circuits), packaging (i.e., aluminium-coated PET film), and in contemporary art (see the work of Larry Bell). Similar processes are sometimes used where thickness is not important: for instance, the purification of copper by electroplating, and the deposition of silicon and enriched uranium by a CVD-like process after gas-phase processing.
Deposition techniques fall into two broad categories, depending on whether the process is primarily chemical or physical.〔''Functional Polymer Films'' Eds. R. Advincula and W. Knoll – Wiley, 2011, ISBN 978-3527321902.〕

抄文引用元・出典: フリー百科事典『 ウィキペディア(Wikipedia)
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